Facilities of YAGI Group　

Electron beam writer,　Elionix ELS-3300 TFE emitter	Electron beam writer　Elionix ELS-6900 LaB6 emitter
Furnace for anealing and CVD	Microscope for atomic layer transfer
H2 anealing furnace	Glove boxes
Chemica laboratory with draft	Vacuum evaporator with e-gun
Vacuum evaporator for thermal evaporation This also serves as a magnetron sputter.	Photo lithography related equipments
Plasma etching machine gas:　　CF4, Ar, O2	Dilution refrigelators
Atomic force microscope. Topometrix Computer interface改造済	３helium system

Others