Facilities

Facility in our Laboratory

• For Measurement

Dilution refrigerator（x 2）, 3He refrigerator,  Superconducting magnet, Microwave system,

Low frequency and DC resistance measurement system, Micro prober

• For Fabrication

Electron beam write（ｘ2 )，e-Gun evaporator, thermal evaporator, magnetron sputter,

Reactive Ion etching, Thermal CVD, H2 anneal furnace, Wedge wirebonder.

Nomarski optical microscope. Crystal growth furnace.

Accessible Facility in Hiroshima University

Atomic force microscope, FE SEM, Raman Spectrometer